Person
Bamdad Afra
This person is no longer with EPFL
Related publications (5)
Influence of Residual Water and Carbon Containing Molecules in Focused Electron Beam Induced Processes
Focused Electron Beam Induced Processing (FEBIP) is a technique used for etching and deposition of micro- and nano-structures using a focused electron beam. FEBIP is commonly carried out in a Scanning Electron Microscope (SEM) with a Gas Injection System ( ...
EPFL2011Combinatorial Discovery and Optimization of Amorphous HfO2-Nb2O5 Mixture with Improved Transparency
Paul Muralt, Patrik Willi Hoffmann, Silviu Cosmin Sandu, Ali Dabirian, Yury Kuzminykh, Estelle Wagner, Scott Harada, Bamdad Afra, Giacomo Benvenuti
Combinatorial high vacuum chemical vapor deposition (HV-CVD) of mixed HfO2-Nb2O5 thin films has been demonstrated to yield amorphous layers at substrate temperatures where individually deposited pure HfO2 and Nb2O5 films are polycrystalline. Spectroscopic ...
Electrochemical Society2010Tailoring of Optical Properties of Alumina films deposited by High Vacuum CVD (HV-CVD)
Patrik Willi Hoffmann, Yury Kuzminykh, Xavier Multone, Bamdad Afra
The deposition of amorphous alumina (Al2O3) films on four inch wafers with high deposition rate (up to 50 nm/min) by an advanced HV-CVD technique is discussed. Amorphous nature of the films is confirmed by X-ray diffraction. Refractive index of the deposit ...
ECS - The Electrochemical Society2009Gas assisted focused electron beam induced etching of alumina
Patrik Willi Hoffmann, Tristan Bret, Bamdad Afra
This study investigates focused electron beam induced etching for the removal of alumina particles on patterned extreme ultra violet (EUV) mask using nitrosyl chloride (NOCl) as assist gas. As potential contaminant, particles of aluminum oxide (alumina, Al ...
2009LTCC ultra high isostatic pressure sensors
Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Niklaus Johner, Bamdad Afra
Piezoresistive pressure sensors using classical deformable structures such as membranes progressively run into difficulties at very high pressures (above 1 to 2 kbar), due to the decreasing ratio between the available sensing strain on the outer membrane s ...
2007