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The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.
Auke Ijspeert, Jonathan Patrick Arreguit O'Neill, Simon Lukas Hauser, Matthieu Guillaume Marie Dujany
Jean-Philippe Ansermet, Marcin Bialek