Publication

Advanced sol-gel processing of PZT thin films for piezoelectric MEMS structures

Publications associées (67)

Parameters influencing PZT thick films densification

The shape of the grains and the granulometry distribution of the PZT powder are the main factor influencing the densification. In addition, we shown that a higher concentration of PZT powder in the ink with a right rheology of the ink improves the density ...

1999

Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications

Paul Muralt, Georges-André Racine

Ultrasonic motors for low electrical power applications are considered for portable devices such as an electronic wristwatch. For the study of a standing wave type motor, a modular approach was proposed, where stators and rotors are added in an assembly st ...

1998

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Nico de Rooij, Nava Setter, Georges-André Racine

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...

1998

Conducting barrier electrodes for direct contact of PZT thin films on tungsten

Nava Setter, Paul Muralt, Thomas Maeder

Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...

1998

Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics

Dragan Damjanovic

Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics are reviewed with the aim of providing an insight into different processes which may affect the behaviour of ferroelectric devices, such as ferroelectric memori ...

1998

Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

Photoinduced poling of lead titanate zirconate thin films

Nava Setter

The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...

1997

Pyroelectric thin-film sensor array

Nava Setter, Paul Muralt, Peter Ryser

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modu ...

1997

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Nico de Rooij, Nava Setter, Philippe Renaud, Georges-André Racine

The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflect ...

1996

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Paul Muralt, Thomas Maeder

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflection ...

Elsevier1996

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