Publication

Fabrication and characterization of PZT thin films for micromotors

Publications associées (41)

Top-interface-controlled switching and fatigue endurance of (Pb, La)(Zr,Ti)O-3 ferroelectric capacitors

Nava Setter, Alexander Tagantsev, Igor Stolichnov

Mechanisms of polarization switching and fatigue in (Pb, La)(Zr, Ti)O-3 (PLZT) films are studied by comparative analysis of degradation and leakage conduction of PLZT capacitors with Pt, SrRuO3 (SRO), and layered Pt/SRO (80/5 nm) electrodes. It is found th ...

1999

Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications

Paul Muralt, Georges-André Racine

Ultrasonic motors for low electrical power applications are considered for portable devices such as an electronic wristwatch. For the study of a standing wave type motor, a modular approach was proposed, where stators and rotors are added in an assembly st ...

1998

A new converter topology for drives is presented in this paper: a three-phase multilevel converter with separately regulated dc power supplies. The dc voltages are provided by medium-frequency dc–dc converters. The applications for the converter are especi ...

1998

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The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...

1998

Conducting barrier electrodes for direct contact of PZT thin films on tungsten

Nava Setter, Paul Muralt, Thomas Maeder

Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...

1998

NOVELTY - For control mono-phase or multiphase machines in motor or generating mode with or without pulse width modulation. USE - Control of electrical rotating machines. ADVANTAGE - Can be used for control of single phase and three phase machines. DETAILE ...

1997

The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...

1997

Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

Fatigue of piezoelectric properties in Pb(Zr,Ti)O-3 films

Nava Setter, Alexander Tagantsev, Enrico Colla

Piezoelectric properties of Pb(Zr,Ti)O-3 thin films are investigated as a function of the number of bipolar (switching) and unipolar (nonswitching) voltage pulses. The longitudinal piezoelectric coefficient d(33) decreases with bipolar fatigue reflecting t ...

1996

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflection ...

Elsevier1996

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