Micro and Nanofabrication: Inspection and Metrology

In course

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Description

This lecture covers optical microscopy variations such as Bright Field, Dark Field, and Differential Interference Contrast, used for inspection and dimension measurement in Micro and Nanofabrication. It explains the basics of an optical microscope, the configuration, and the different modes of operation. The lecture also discusses the calibration of metrology tools, including the measurement of XY and Z dimensions, and the process of checking the results of micro and nanofabrication processes.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_eacyfo11

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Ontological neighbourhood

Biology

Anatomy: Histology

Physics

Physical quantities: Topics in physical quantities

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