Lithography: Methods and Importance

This lecture covers lithography as a method to print on smooth surfaces, defining patterns on polymer layers for micro/nano fabrication. It explains various types of lithography such as optical, electron beam, nano imprint, and more. The importance of lithography in establishing the minimum features that can be transferred is highlighted. The steps involved in lithography, including preparation of design and mask, mask fabrication, coating, exposure, resist properties, alignment, and development, are discussed. The lecture also addresses the main issues related to lithography.