Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.