Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
