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Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores cleanroom basics and contamination issues in microfabrication processes, emphasizing the impact of contaminants on device performance and reliability.
