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Sputter deposition
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Thin film
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Deposition: Physical Vapor Deposition (PVD) Techniques
Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
MEMS & Cleanroom: Thin Material Layers and Vapor Creation
Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.
Sputtering: Film Growth and Control Parameters
Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.
Physical Vapor Deposition: Basics and Applications
Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.
Thin Film Growth: Atoms Arrival and Adhesion
Delves into thin film growth, adhesion, crystal structure, and stresses.
FIB Applications: Nanofabrication and Failure Analysis
Explores Focused Ion Beam (FIB) applications in nanofabrication and failure analysis.
Focused Ion Beam: Principles and Applications
Explores the principles and applications of Focused Ion Beam (FIB) technology, including imaging, milling, and 3D microscopy.
Ion Beam Etching
Introduces ion beam etchers, combining physical sputtering with chemical activity.
Sputtering: Ion Target Interactions
Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.
Chemical Vapor Deposition: Oxide Formation and ALD
Explores CVD processes for oxide formation and ALD in micro and nanofabrication.
