Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
