MEMS & Cleanroom: Thin Material Layers and Vapor Creation

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Related lectures (32)

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Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Focused Ion Beam: Principles and Applications

Explores the principles and applications of Focused Ion Beam (FIB) technology, including imaging, milling, and 3D microscopy.

Thin Films: Growth and Interfaces

Explores dislocation motion, thin film growth models, and interface nature in modern technology.

Chemical Vapour Deposition: Micro and Nanofabrication

Explores Chemical Vapour Deposition for micro and nanofabrication processes.

Sputtering in CMi

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Nanofabrication: Techniques and Challenges

Explores nanofabrication techniques, challenges, and the use of silicon wafers.

Focused Ion Beam: Principles and Applications

Explores the principles and applications of Focused Ion Beam (FIB) technology, including ion-solid interactions, imaging, milling, and deposition.

Plasma Focused Ion Beam: Applications and Techniques

Explores Plasma Focused Ion Beam technology, covering high-precision imaging, material deposition, and automated system checks.