Fabrication extended: EtchingCovers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Microfabrication TechnologiesExplores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Wet Etching: Glass and SiliconExplores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
Etch Stop TechniquesExplores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Silicon Etching TechniquesExplores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
