Explores Energy-Dispersive X-ray Spectroscopy (EDS) in electron microscopy, covering x-ray generation, detection, quantification, and mapping of elements in samples.
Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Discusses X-ray detectors' properties, sensitivity, and signal-to-noise ratio quantification, as well as systematic errors like flat field corrections.
