Sputtering: Plasma Formation and Thin Film Deposition

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Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, AC plasma processing, and ozone production.

Chemical Vapor Deposition: Oxide Formation and ALD

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Sputtering: Ion Target Interactions

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Sputtering: Film Growth and Control Parameters

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Sputtering in CMi

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.