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Lecture
Sputtering: Ion Target Interactions
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Physical Vapor Deposition: Principles and Applications
Explores the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies, covering topics like metal microstructure creation and sputtering efficiency.
Physical Vapor Deposition: Basics and Applications
Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.
Film Growth: Growth Modes and Crystal Structure
Explores growth modes in film growth and crystal structure determination based on materials used.
Thin-Film Processing: Plasma Deposition
Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.
Sputtering: Film Growth and Control Parameters
Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.
Beam-Matter Interactions
Explores beam-matter interactions, thermal effects, chemical effects, atomic displacements, and matter emission mechanisms in electron microscopy.
Scanning Electron Microscopy: Fundamentals and Applications
Covers the fundamentals of scanning electron microscopy, including electron matter interaction, imaging techniques, and related advanced topics.
Analytical Electron Microscopy: Spectroscopy and Microanalysis
Explores Analytical Electron Microscopy techniques for chemical analysis using EELS and EDX.
Fabrication extended: Deposition
Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.
Thin-Film Processing: Deposition Techniques
Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
