Lectures related to Dry etching: fundamentals and applications

Plasma Generation and Ion Sheath in Etching

Explores plasma generation, ion sheath, DC bias voltage, and electrode design in micro and nanofabrication processes.

Industrial Plasmas: Applications and Chemistry

Explores industrial plasma applications, breakdown phenomena, and plasma chemistry challenges, including gas-phase reactions and transport processes.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, AC plasma processing, and ozone production.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Sheaths and Plasma Etching

Explores sheaths, ion flux, Bohm criterion, and plasma etching concepts.

Sputtering: Plasma Formation and Thin Film Deposition

Covers sputtering, plasma creation, and thin film deposition processes.

Physics of Manufacturing: Non-conventional Processes

Explores non-conventional manufacturing processes like grinding, electro-discharge machining, and waterjet cutting, including modelling and related processes.