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Lecture
Dry Etching Techniques
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Related lectures (32)
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Microfabrication Technologies
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Industrial Plasmas: Applications and Chemistry
Explores industrial plasma applications, breakdown phenomena, and plasma chemistry challenges, including gas-phase reactions and transport processes.
Industrial Plasmas: Sheath Formation and Plasma Etching
Explores sheath formation, plasma etching, AC plasma processing, and ozone production.
Sheaths and Plasma Etching
Explores sheaths, ion flux, Bohm criterion, and plasma etching concepts.
Semiconductor Devices II: Contact Resistance Modeling
Explores contact resistance modeling in semiconductor devices, focusing on gate voltage calculation and defect analysis.
Micro and Nanofabrication for Optomechanics
Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.
Nanoscale MEMS: Fabrication, Tips, and Microscopy
Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.
Sputtering: Plasma Formation and Thin Film Deposition
Covers sputtering, plasma creation, and thin film deposition processes.
Non-equilibrium Processes: Electron-Phonon Interactions
Delves into non-equilibrium electron-phonon interactions, energy conversion, and transport regimes.
Contact Resistance in Semiconductor Devices
Explores contact resistance in semiconductor devices and methods to measure and extract it.
