Reactive-ion etching

Applied sciences
Electrical engineering
Electromechanics
Microelectromechanical systems

About
Privacy
Disclaimer

Graph Chatbot

Related lectures (32)

Page 2 of 4

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.

Wet Etching: Sacrificial Layers

Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.