Reactive-ion etching

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Related lectures (32)

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Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Micro and Nanofabrication: Basics and Techniques

Covers the basics of micro and nano fabrication techniques for MEMS devices.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Industrial Plasmas: Applications and Chemistry

Explores industrial plasma applications, breakdown phenomena, and plasma chemistry challenges, including gas-phase reactions and transport processes.

Physics of Manufacturing: Non-conventional Processes

Explores non-conventional manufacturing processes like grinding, electro-discharge machining, and waterjet cutting, including modelling and related processes.

Sheaths and Plasma Etching

Explores sheaths, ion flux, Bohm criterion, and plasma etching concepts.

Plasma Generation and Ion Sheath in Etching

Explores plasma generation, ion sheath, DC bias voltage, and electrode design in micro and nanofabrication processes.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Lithography: Mask and Laser Writing

Explores photomask creation, exposure methods, direct laser writing, resolution, and resist development in MEMS applications.