Fabrication extended: EtchingCovers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Dry Etching TechniquesExplores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Wet Etching: Glass and SiliconExplores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
Silicon Etching TechniquesExplores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
Ion Beam EtchingIntroduces ion beam etchers, combining physical sputtering with chemical activity.
Microfabrication TechnologiesExplores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.