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Lecture
Sputtering: Plasma Formation and Thin Film Deposition
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Thin-Film Processing
Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.
Thin-Film Processing: Plasma Deposition
Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.
Deposition: Physical Vapor Deposition (PVD) Techniques
Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
Thin-Film Processing: Deposition Techniques
Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
Physical Vapor Deposition: Basics and Applications
Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.
MEMS & Cleanroom: Thin Material Layers and Vapor Creation
Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.
Plasma Physics: Sheaths and Etching
Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.
PVD 7: Other Techniques
Explores ion plating, MBE, and PLD techniques in thin film fabrication.
Plasma Physics: Breakdown in Gases
Explores breakdown in low-pressure gases, plasma physics applications, and the self-sustaining discharge phenomenon.
Film Growth: Growth Modes and Crystal Structure
Explores growth modes in film growth and crystal structure determination based on materials used.