Micro and Nanofabrication: Chemical Reactions and Etching Processes

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Related lectures (32)

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Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Photovoltaic Cell Processing

Explores the fundamentals and processes for photovoltaic devices, including impurities in polysilicon, ingot growth methods, wire sawing, and the impact of cracks on wafer strength.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.