Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores the fundamentals and applications of scanning probe microscopy, including STM setup, surface reconstruction, quantum tunneling, and scanning force microscopy.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
