Ion beam | EPFL Graph Search

An ion beam is a type of charged particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. A variety of ion beam sources exists, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most common ion beams are of singly-charged ions. Units Ion current density is typically measured in mA/cm^2, and ion energy in eV. The use of eV is convenient for converting between voltage and energy, especially when dealing with singly-charged ion beams, as well as converting between energy and temperature (1 eV = 11600 K). Broad-beam ion sources Most commercial applications use two popular types of ion source, gridded and gridless, which differ in current and power characteristics and the ability to control ion trajectories. In both cases electrons are needed to generate an ion beam. The most common electron emitters are hot filament and hollow cathode

Edge-contacted graphene with slope engineering by stencil lithography

Farzad Rezaeianaran

One approach to overcome the high contact resistance between 3D metals and 2D materials/heterostructures is employing edge contacts [1]. A low-resistance edge contact on boron nitride/graphene/boron nitride heterostructure using photolithography has been demonstrated in 2013[1]. The aim of this project is therefore to simplify the process by replacing the photolithography step with stencil lithography. In the first part of the project, the focus is on the transferring of chemical vapor grown graphene to SiO2/Si wafers. We were able to make two graphene transfers; however, in both cases the graphene had many cracks and tears which would distort any electrical measurements. Therefore, we used these samples for experimenting with etching of HfO2 and slope engineering and showed that ion beam etching is suitable for both purposes. Later, graphene on SiO2/Si chips were purchased which were accordingly processed and used for electrical characterization. Some of the (transfer length measurement) patterns showed conductive behavior; however, the measured contact resistance was considerably high (8kΩ). Further studies are required to explain the high contact resistance observed. A good starting point would be to obtain a cross-section sample from the contact area using focused ion beam and study the said area using transmission electron microscopy.

2018

In-situ Laue Diffraction During Compression of Directionally Solidified Mo Micropillars

Julien René André Zimmermann

With recent developments in micro and nano-technologies, mechanical components such as those used in medicine or electronics tend to be miniaturized, requiring a new set of testing techniques to study their reliability and performance. One of the new methods is micro-pillar compression testing, which allows the study of mechanical properties of confined volumes precisely shaped by focused ion beam (FIB) milling from sometimes complex microstructures. This technique has garnered a great deal of interest in recent years; on one hand because of its apparent simplicity, on the other hand because it revealed an unexpected size dependence in the flow stress of single crystals when the pillar diameter was reduced below a few tenths of a micrometre. The flow stress of FIB milled face centred cubic (fcc) micro-pillars appears to follow a power law as a function of their size. In contrast, non-FIB milled, body centred cubic (bcc) eutectic Molybdenum (Mo) alloy pillars prepared by directional growth exhibit, in their pristine state, whisker-like behaviour without a size effect. Furthermore, after FIB milling or moderate pre-deformation, the whisker character is lost and the typical scatter of the flow stress usually observed for FIB milled pillars is reproduced. After large pre-deformation the scatter vanishes and the pillars exhibit no size effect. These findings show that 1) the deterministic parameter in the size effect can be correlated with the initial microstructure of the pillar, and 2) FIB milling influences this microstructure. This study aims to link the deformation modes occurring in small-scale pillars with their initial microstructure by studying directionally solidified eutectic Mo-alloy pillars with a diameter of 1 micrometre. In-situ Laue diffraction experiments during the compression of such defect-free pillars show that with readily-available dislocation sources from a concave pillar top, the {112}[111] slip system with the highest Schmid factor is initially activated and not the allegedly assumed {110}[111] slip system that is typical for bcc metals. Post-mortem slip trace analysis and TEM observations confirm this finding. Moreover, 3D atom probe measurements and TEM images show that this behaviour can be linked to the presence of both alloying elements and fcc nano-precipitates found in the bcc Mo-alloy. Both can lead to a decrease of the critical temperature and the observation of an fcc-like deformation. Additionally, it is shown that both FIB milling and pre-deformation introduce defects in the initially dislocation-free pillars. In addition to this, pillars prepared under similar conditions yield quite different microstructures. The angle between the focused ion beam and the crystal orientation is found to play an important role in the creation of defects. It can also be shown that pillars with high initial dislocation density deform bulk-like and exhibit strain hardening, while pillars with low initial dislocation content demonstrate a large scatter in the flow and yield stress and exhibit large strain burst at later deformation stages. Furthermore several slip systems are activated before the flow stress is reached for pillars containing initially low dislocation content. Interestingly the first activated slip system can be linked to the initial streaking direction; slip is observed on the {112} plane that contains excess dislocations. For both the as-prepared pillars and the pillars with low initial dislocation content, the yield seems to be source limited, which is not the case for pillars with high initial dislocation content.

EPFL2011

Embrittlement induced by the synergistic effects of radiation damage and helium in structural steels

Kun Wang

Ferritic/martensitic steels are candidate materials for fusion reactor structural components, liquid metal containers of spallation neutron sources, and accelerator driven systems, with good radiation resistance and thermo-mechanical properties. However, embrittlement resulting from the combined effects of radiation induced displacement damage (measured in dpa = displacement per atom) and transmutation products, especially helium gas, is one of the key issues. Four different steels were selected for mechanical and microstructural studies to understand the mechanisms of embrittlement induced by the combined effects of displacement damage and helium after irradiation in SINQ, the Swiss spallation source. The irradiations conditions were in the range: 10.7 ¿ 20.4 dpa with 850-1750 appm He at 160-300 °C. The evolution of the mechanical properties after irradiation was investigated by tensile and hardness tests. Radiation-induced defect clusters and helium bubbles were quantified by transmission electron microscopy (TEM). Emphasis was put on the deformation mechanisms under the different observed fracture mode, (ductile, quasi-cleavage and intergranular), whose occurrence depends on the irradiation conditions (dpa, He content and irradiation temperature). The tensile stress-strain curves and the scanning electron microscopy images of fracture surfaces showed distinct fracture mechanisms under different irradiation and test conditions. The tensile tests showed a yielding stress increase and loss of ductility of irradiated specimens. Hardness was measured on the specimens before tensile testing. The hardness results demonstrated an increasing trend with irradiation dose and helium content. TEM observations were done for all irradiated fractured specimens. Small defect clusters were observed in the 12.3 dpa specimen, but large defect clusters with loop-shape were very few. In the specimens of 17.2, 17.7 and 20.4 dpa, many large dislocation loops were detected besides small clusters. In addition, helium bubbles were observed in all specimens. The average size of defect clusters increased from 4.2 nm to 11.8 nm with dose increasing from 12.3 dpa to 20.4 dpa, whereas the number density did not change significantly. Meanwhile, the average size of visible helium bubbles increased from 1.03 nm to 1.93 nm. The microstructures in deformed area of irradiated specimens were observed and defect free channels with {110} and {112} slip planes were found in some specimens, indicating plastic flow localization. The average width of the channels is about 100 nm. Regarding the brittle samples, the TEM-lamella were extracted directly below intergranular fracture surfaces or cleavage surfaces by focused ion beam. Strikingly, deformation twinning was observed as the main feature in three irradiated specimens at high dose. Only twins with {112} planes were observed in all of these samples. The average thickness of twins is about 34 nm. Twins started from a fracture surface became gradually thinner with distance away from the fracture surface and stopped in the matrix finally. Features such as twin-precipitates interaction, twin-grain boundary and/or lath boundary interaction were observed. Twinning bands were seen to be arrested by grain boundaries or large precipitates, but could penetrate martensitic lath boundaries. Unlike the case of defect free channels, inside twins small defect-clusters, dislocation loops and dense small helium bubbles were observed.

EPFL2015