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Lecture
Plasma Physics: Sheaths and Etching
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Industrial Plasmas: Sheath Formation and Plasma Etching
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Industrial Plasmas: Sheath Formation and Plasma Etching
Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.
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Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.