Wet Etching: Glass and SiliconExplores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
Etch Stop TechniquesExplores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Microfabrication TechnologiesExplores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Ion Beam EtchingIntroduces ion beam etchers, combining physical sputtering with chemical activity.
