Lithography: Mask and Laser Writing

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Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Lithography: General Concepts and Mask Fabrication

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Micro and Nanofabrication: Basics and Techniques

Covers the basics of micro and nano fabrication techniques for MEMS devices.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Lithography: Nanoscale Patterning Techniques

Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Lithography: Fabrication Extended

Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.