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Lecture
Thin-Film Processing: Removal and Deposition
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Thin-Film Processing: Deposition Techniques
Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
Thin-Film Processing
Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.
Thin Film Growth: Mechanisms and Applications
Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.
Deposition: Physical Vapor Deposition (PVD) Techniques
Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
Stress in Thin Films: Film Growth and Microfabrication
Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.
PVD 7: Other Techniques
Explores ion plating, MBE, and PLD techniques in thin film fabrication.
Fabrication extended: Deposition
Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.
Thin Films: Growth and Interfaces
Explores dislocation motion, thin film growth models, and interface nature in modern technology.
MEMS & Cleanroom: Thin Material Layers and Vapor Creation
Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.
Thin Films: Deposition and Growth
Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.