Covers Energy Dispersive X-ray Microanalysis, explaining how X-rays reveal elemental composition and discussing X-ray generation, detection, efficiency, and quantification.
Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.
