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Lecture
Film Growth: Growth Modes and Crystal Structure
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PVD 7: Other Techniques
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Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.
Thin-Film Processing: Plasma Deposition
Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.
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Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
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Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.
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Explores dislocation motion, thin film growth models, and interface nature in modern technology.
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Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
Thin Film Growth: Atoms Arrival and Adhesion
Delves into thin film growth, adhesion, crystal structure, and stresses.