Electron Beam Lithography: Proximity Effect Corrections

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Microfabrication Technologies

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Lithography: General Concepts and Mask Fabrication

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

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Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Lithography: Tools and Techniques

Covers the principles and tools used in lithography for micro and nanofabrication.