Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.
Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Explores Energy-Dispersive X-ray Spectroscopy (EDS) in electron microscopy, covering x-ray generation, detection, quantification, and mapping of elements in samples.