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Lecture
Physical Vapor Deposition: Basics and Applications
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Related lectures (32)
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PVD 7: Other Techniques
Explores ion plating, MBE, and PLD techniques in thin film fabrication.
Deposition: Physical Vapor Deposition (PVD) Techniques
Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
Thin-Film Processing
Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.
MEMS & Cleanroom: Thin Material Layers and Vapor Creation
Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.
Thin-Film Processing: Plasma Deposition
Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.
Film Growth: Growth Modes and Crystal Structure
Explores growth modes in film growth and crystal structure determination based on materials used.
Stress in Thin Films: Film Growth and Microfabrication
Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.
Thin Film Growth: Atoms Arrival and Adhesion
Delves into thin film growth, adhesion, crystal structure, and stresses.
Thin-Film Processing: Deposition Techniques
Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
Sputtering: Plasma Formation and Thin Film Deposition
Covers sputtering, plasma creation, and thin film deposition processes.
